Abstract
This study demonstrates the growth of Li-β-alumina films by laser chemical vapor deposition and investigates the effects of deposition temperature (T<sub>dep</sub>), molar ratio of Li/Al (R<sub>Li/Al</sub>) and total pressure (P<sub>tot</sub>) on the phase formation, microstructure, orientations and deposition rate (R<sub>dep</sub>) of the film. Single-phase Li-β-alumina films were deposited at T<sub>dep</sub> = 1100 K–1300 K, R<sub>Li/Al</sub> = 20–50 and P<sub>tot</sub> = 600–1000 Pa. Li-β-alumina films with the hexagonally faceted platelet morphology (flake-like) were deposited at P<sub>tot</sub> = 1000 Pa, whereas bulky grains were formed at P<sub>tot</sub>=600 Pa. The maximum R<sub>dep</sub> of Li-β-alumina films was 30 μm h<sup>−1</sup> at Tdep=1225 K, R<sub>Li/Al</sub>=30 and P<sub>tot</sub>=600 Pa. At room temperature the ionic conductivity of Li-β-alumina film prepared by laser CVD reached 2×10<sup>-4</sup> S/cm, demonstrating superior performance and significant potential in lithium battery.
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