Abstract
We present a method for BAW (bulk acoustic wave) filters computation. This method compares the equivalent impedance of the BUTTERWORTH-VAN DYKE (BVD) model based on an electrical equivalent circuit with the impedance obtained by piezoelectric equations in one dimension for a piezoelectric structure. Using the least squares method, the three elements of the BVD model can be determined as a function of the dimensions and the properties of the piezoelectric resonator. Based on the proposed method, a ladder piezoelectric 7 pole filter can be easily optimized using an electrical synthesis. The frequency of the proposed filter is around 1.84GHz and the band pass close to 100MHz. This method can be used either for FBAR (film bulk acoustic resonator) or SMR (solidly mounted resonator) structure.
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