Abstract

In this work, the dc reactive magnetron sputtering technique was used to prepare and deposit nanostructured titanium dioxide (TiO2) thin films on glass substrates. Titanium dioxide thin films of mixed phase (anatase+rutile) and single phase (anatase) were prepared using different gas mixing ratios, and for both of the two phases, they were diagnosed via x-ray diffraction (XRD). It was found that the contents of rutile in mixed phase dependent on the deposition time increased from the ratio of 40 to 46% and 50% as the deposition time increased from 3 h to 3.30 and 4 h. The photocatalytic activity of the mixed and single phase TiO2 was measured by kill the bacteria Escherichia coli (E.Coli) under exposure to UV-radiation. It was proven that the photocatalytic activity in the mixed phase (TiO2) gave better results weight fraction is 40% as an antibacterial activity. Based on the obtained results anti-bacterial activity of dioxide titanium nanoparticles was dependent on the concentration and phase of TiO2 and weight fraction of mixed-phase.

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