Abstract

Epitaxial thin films of the Li-ion conducting solid electrolyte Li0.33La0.56TiO3 were grown by pulsed laser deposition. The growth temperature and oxygen partial pressure required for crystallization were higher than 900°C and 5Pa, respectively. Further optimization of growth conditions led to the formation and orientation control of Li-ion conducting epitaxial Li0.33La0.56TiO3 thin films.

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