Abstract
The growth of polycrystalline curved surface diamond film using direct current plasma jet CVD (DCPJCVD) is measured by those techniques. The relationships between morphology, microstructure, and film quality are investigated by scanning electron microscopy (SEM) and Raman spectroscopy, Fourier transform infrared spectroscopy (FTIR), respectively. The results show that, after molybdenum substrate was polished by series of diamond powder, atom hydrogen etching, respectively, a much higher nucleation density can be achieved. Synthetic diamond film is compact, continuous and uniform, and diamond film grows with the columnar spreading from the nucleation surface to the growth surface, (111) faces were dominant in polycrystalline texture diamond film. Raman spectrum indicates that there is only diamond characteristic peak in diamond film, and high quality curved surface diamond film was prepared. IR transmittance of curved surface diamond film in the range of 750 - 4300 cm-1 reached about 60%. Meantime, the IR transmittance was almost the same in the central and fringe regions of the film. These properties indicate that curved surface diamond film has a promising application in infrared windows and dome.
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