Abstract
W-containing carbon coatings were deposited on plain carbon steel and titanium substrates by Combined Magnetron Sputtering and Ion Implantation (CMSII) technique. A target made of fine grain graphite with cylindrical tungsten pins mounted in the area of maximum sputtering rate was used. High voltage pulses (− 30 kV, 20 μs, and 25 Hz) were superposed over the DC bias. By adjusting the processing parameters nanocomposite nc-WC 1 − x /a-C coatings with a W content from 20 to 45 at.%, with a hardness of 12–22 GPa and a friction coefficient in the range of 0.12–0.22 were produced. These coatings have a thickness of 10–13 μm, good wear resistance and a good thermal stability up to 673 K.
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