Abstract
The symmetric and asymmetric double Langmuir probe systems with their necessary driving circuits are developed for characterization of low pressure inductively coupled nitrogen plasma, generated and sustained with 13.56 MHz RF source and an automatic impedance matching network. First of all, the plasma parameters such as ion saturation current, electron temperature and electron number density are determined with symmetric double probe system at different input RF powers, filling gas pressures and radial distance Received 4 March 2011, Accepted 28 March 2011, Scheduled 30 March 2011 Corresponding author: Muhammad Yasin Naz (yasin603@yahoo.com).
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
