Abstract
Parallel and absolute measurement of surface shape using wavelength scanning interferometry has been applied to various objects including diffuse surfaces and milled ones having discontinuities such s steps, dips, and protrusions. We have employed not only the Michelson setup but also the Fizeau one newly introduced. The behaviors of interference signals arising from these objects are experimentally compared. Spiky noises have been observed from the milled surfaces and the defocused diffuse surface. In spite of the noise we succeeded in measuring steps and narrow dips on a mirror and a milled surface, as well as a cylindrical protrusion on a diffuse surface. With a dye laser of tuning range of 4.2 nm we attained the resolution of 39 micrometer within the depth of 3 mm.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
