Abstract
An accurate Patterson function, free of artifacts, is obtained by transforming low-energy electron diffraction I-V spectra at multiple incident angles. The demonstration is carried out using normal incidence measured spectra and calculated spectra at three angles of incidence. The errors between intensity spots in the Patterson function and known interatomic distances are less than 0.01 A in the horizontal direction and 0.09 A in the vertical direction. The reason for the high accuracy in the horizontal direction is given.
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