Abstract

Surface morphology after Au-adsorption-induced faceting on a 4° off Si(001) vicinal surface was studied by reflection electron microscopy. The surface morphology changes as a function of temperature (780–940°C) and of deposition rate of Au. Steeper facets are formed at a lower temperature and a higher deposition rate. The kinetics and energetics in the system govern the surface morphology (facet orientation) and later become dominant at high temperature. The transition between the step bands and facets was also observed and it was found that the (119)-Au facet is stable at 920°C.

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