Abstract
Smooth, superconducting films of Bi 2Sr 2CaCu 2O 8+° have been prepared by reactive sputtering from elemental targets in the presence of ozone. The influence of substrate temperature, deposition rate, and ozone pressure on the resulting films are discussed. Films deposited on SrTiO 3 substrates are c-axis oriented and featureless for substrate temperatures below 710°C. Above this temperature, small inclusions of CuO appear. Films on MgO exhibit mixed a-axis and c-axis orientation below about 710°C, and inclusions of CuO above this temperature. The temperature at which this transition occurs increases with increasing deposition rate. T c increases and then decreases sharply with decreasing oxygen content. The oxygen partial pressure corresponding to the maximum T c of 77 K is well above the thermodynamic stability limit for Bi 2Sr 2CaCu 2O 8+°, suggesting that an optimum carrier concentration has been achieved for these films.
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