Abstract
Hydrogen, deuterium and oxygen densities on diamond (100) surfaces have been investigated by elastic recoil detection analysis (ERDA) and Rutherford backscattering spectrometry (RBS). The (100) surfaces were homoepitaxially grown by chemical vapor deposition (CVD), and surface reactions were enhanced by radical-beam treatments. Atomic force microscopy (AFM) was also used for observation of surface topography. AFM images indicate the homoepitaxially grown diamond (100) surfaces were almost atomically flat surfaces. Hydrogen density of a hydrogen-radical-beam-treated diamond (100) surface was about 3×10 15 atoms/cm 2 and was not varied by oxidation with oxygen radical beam. The hydrogen density is about twice as large as that of the ideal hydrogen-terminated 2×1 surface. Oxygen density of the oxygen-radical-beam-treated surface was about ≤1×10 15 atoms/cm 2. Either hydrogen-radical-beam or deuterium-radical-beam treatments decreased the hydrogen density. The variations of hydrogen and oxygen densities were discussed in terms of surface structures and roughness.
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