Abstract
A new technology, which enables the transfer of thin films or thin film devices from original substrate to any substrate by using laser annealing, has been investigated. This technology was named SUFTLA which stands for surface free technology by laser annealing. Low temperature (/spl les/425/spl deg/C) polycrystalline-silicon thin film transistors (poly-Si TFTs) and TFT circuits could be successfully transferred from glass or quartz substrate to plastic film. The circuit functionalities of CMOS ring oscillators were not affected by this transfer.
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