Abstract
An anatase TiO2 film was epitaxially grown on a conductive Nb-doped single-crystalline SrTiO3 (100) substrate by metalorganic chemical vapor deposition. RuO2 Schottky electrode was fabricated on the epitaxial anatase film by reactive dc magnetron sputtering. The dark I–V and capacitance–voltage characteristics indicated the good rectification and thermal stability of the RuO2/anatase junction. This RuO2/anatase junction enables the stable measurements of deep level transient spectroscopy in the high-temperature region and is a promising Schottky electrode to examine the origins of deep levels in the band gap of anatase.
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