Abstract
In the fields of semiconductor and electronics, fine processing at the micro and nanoscale is crucial. Thin film materials are an important part of this fine processing and their small molecular structure, ranging from microns to nanometers, is directly linked to achieving high throughput. Breakthroughs in thin film materials have accelerated research on high throughput systems and ultimately enabled mass production.
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More From: Transactions on Computer Science and Intelligent Systems Research
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