Abstract
In this paper, the Mg35Sb65/Sn15Sb85 superlattice-like films were prepared by magnetron sputtering and the comprehensive properties of were systematically studied. The amorphous-to-crystalline transformation was researched with a situ resistance–temperature measurement system to evaluate the thermal stability. X-ray diffraction, Raman and transmission electron microscopy were employed to explore the change of phase structure at different annealing temperatures. The reversible resistance switching was achieved for [MgSb(7 nm)/SnSb(3 nm)]5-based devices. The results showed that Mg35Sb65/Sn15Sb85 superlattice-like film was a promising phase change material with good thermal stability, fast phase transition and low power consumption.
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