Abstract
TiO<sub>2</sub> thin films were prepared at various calcinations temperatures by sol-gel process and their structural and optical properties were examined. The influence of calcinations temperature on the structural properties of the prepared TiO<sub>2</sub> thin films was investigated by the X-ray diffraction (XRD) and atomic force microscope (AFM). The XRD results showed that TiO<sub>2</sub> thin film was transformed into the anatase phase at 350°C, and further into rutile phase at 850°C. The AFM results show quite a smooth surface and are in reasonably well agreement with the crystallite sizes estimated by XRD peak broadening. The influence of calcinations temperature on the optical properties of the prepared TiO<sub>2</sub> thin films was investigated by UV-Vis spectrum and variable angle incidence spectroscopic ellipsometer (VASE). The results showed the both anatase phase and rutile phase of the TiO<sub>2</sub> thin films prepared have good optical properties in UV region.
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