Abstract
Deformation structure is very common in ultrafast laser processing metal film, but it is undesirable in some application scenarios. In this study, ultrafast laser at burst mode is used to suppress the deformation of metal film induced by ultrafast laser. The experimental research of 40 nm gold film irradiated by ultrafast laser at GHz burst mode has been carried out, with different numbers of sub-pulses from 1 to 25. When the burst fluence is lower than the ablation threshold, the height of bump decreases with the number of sub-pulses increasing in the burst and Molecular Dynamics (MD) simulations are carried out to explore the mechanism of deformation behaviors. While the burst fluence is higher than the ablation threshold, the deformation behaviors around the ablation hole also change interestingly with different number of sub-pulses, which can be divided into three stages. The increase of width of burrs, the decrease of driving force and the molten film left at edge of ablation hole, induced by the number of sub-pulses increasing, cause different deformation behaviors of gold film, respectively.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
