Abstract
Polychromatic synchrotron radiation in the energy-dispersive mode was used for the rapid characterization of thin films and multilayers. This technique takes advantage of the high intensity and excellent collimation properties of white beam synchrotron radiation. The glancing angle diffraction geometry allows structural depth probing and enhanced signal-to-noise ratio by suppressing substrate contributions. The technique was applied to Cu and the films a few hundred Angstrom thick, and to W/C multilayers. [on SciFinder(R)]
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