Abstract
Thin polycrystalline lead zirconate titanate (PZT) films with a Zr:Ti ratio close to morphotropic phase boundary were obtained by radiofrequency sputtering at a temperature of 540 °C on a metal substrate, and their structural and electrophysical properties were studied. The piezoelectric coefficient, remnant polarization, coercive field, and dielectric constant of the PZT film are 3.84 μC/cm2, 1.20 ÷ 1.26 μC/cm2, 1.1 ÷ 1.3·105 V/cm, and 145, respectively. Domains of the perovskite phase are located on the surface of the film protrusions. The magnitude of the piezoelectric modulus of the domain is 17.9 ÷ 22.4 pC/V.
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