Abstract
LiTaO3 samples are implanted by 120keV hydrogen ion with different fluences at room temperature. H+ concentration and distribution is detected using Elastic recoil detection. Experimental results show that the threshold fluence for blistering in LiTaO3 surface is 6×1016ion/cm2. Surface blistering phenomenon is studied by using optical microscopy, Rutherford back scattering spectrometry, transmission electron microscopy and atomic force microscopy. Bubble growing and surface blister’s dependence on annealing process is observed and analyzed. The critical internal pressure and stress of surface blistering in H+-implanted LiTaO3 is derived based on theoretical model and experimental results. Gibbs free energy and cavity critical radius are introduced to explain the blister shrink and rupture observed in the experiment.
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