Abstract
Scanning tunneling microscopy is one of the surface measurement instruments in nano technology field, and the vertical resolution is about 0.01nm. So it is easily affected by the external micro vibration, conversely, we can measure the micro vibration using the working principle of STM. As we all know, the tunneling effect is the negative index relation between the tunneling current and the tunneling gap. On the other hand, the vibration measurement results can be used to offer the foundation in order to reduce the influence of micro random vibration for STM, it is necessary to measure the external vibration to compensate the experiment results of scanning tunneling micros coy. So the experimental device is developed and experiment of vibration detection is made. The experiment results show that results have high sensitivity, good frequency characteristic and the same vibratory response characteristic consistent with scanning tunneling microscopy.
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