Abstract
Abstract Soft-magnetic multilayers with or without SiO2 interlayer were fabricated on Si (111) substrates using magnetron sputtering. The static magnetic and high frequency electromagnetic properties of FeCoB(60 nm)/SiO2(6 nm)/FeCoSiB(t nm) or FeCoB(60 nm)/FeCoSiB(t nm)were systematically investigated. The experimental results showed that all multilayers had an in-plane uniaxial magnetic anisotropy and the interlayer of SiO2 could decouple the different magnetic phases leading to steps in hysteresis loops. Two resonance peaks of complex permeability spectra were observed for FeCoB(60 nm)/SiO2(6 nm)/FeCoSiB(t nm) films. The method to adjust the resonance frequency and FWHM is simple and robust, which may be potential for industrial application.
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