Abstract
Low Temperature Co-fired Ceramic (LTCC) is an insulator and has been used for electronic circuit boards. The features of LTCC are good electric discharge resistance and high rigidity. A GEM foil using LTCC is expected not to be broken by an electric discharge. The manufactured LTCC-GEM has a hole area of 100 × 100 mm2, the hole diameter is 100 µm, and the hole pitch is 200 µm. We have measured the performance with respect to the gain properties of 200 µm thick LTCC-GEM with 55Fe X-ray. In the measurement, the gain achieved was about 2000 for three gases, ArCO2 (Ar:CO2 = 70:30), P10 (Ar:CH4 = 90:10) and T2K (Ar:CF4:iC4H10 = 95:3:2), and the long-term (100 hours) fluctuation was within 6%. And when the 100 × 100 mm2 LTCC-GEM hole area was divided into 10× 10 mm2, the gain uniformity of the entire region was estimated to be 12%.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
