Abstract
Front-side connected, N-channel, normally-off, chemical field effect transistor (ChemFET) microsensors including a SiO 2/Si 3N 4 pH-sensitive gate have been fabricated using a standard P-well silicon technology. The fabrication and packaging processes are described and sensor properties and performances are demonstrated through pH measurements. Finally, the front-side connected ChemFETs microsensors have been adapted to the detection of ions thanks to polyHEMA/siloprene-based ionosensitive membranes. Application is performed through the NH 4 + and NO 3 − ions detection in artificial solutions, evidencing quasi-Nernstian responses ( s≈50 mV/pH) in the appropriate detection ranges. This microsensor will be used for the monitoring of environmental pollution and more precisely for ground water analysis.
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