Abstract
We have investigated the Au–Si(1 0 0) interface as a function of the Au coverage by means of the Si 2p core-level photoemission spectroscopy. At the 1 ML deposition, the spectral feature changed remarkably. This indicates that the deposited Au atoms interact with the surface Si atoms in this deposition range. With increasing the Au coverage at ∼3 ML the spectral feature become three-peak structures at 100.0, 99.4, and 99.0 eV. The appearance of the three-peak structures indicates the Au–Si alloy or Au silicide formation. With further increasing the Au coverage, two peaks at 100.3 and 99.7 eV become dominant. From the curve fitting analysis, the photoemission spectrum at the higher Au coverage was decomposed by three components. Two components at higher binding energy side were assigned to the surface Si atoms while a component at lower binding energy side was assigned to Si atoms in the amorphous silicide layer.
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