Study and Application on Ultrasonical Combined Electrical Micro-Machining the Special Shape Micro-Structures

Abstract

For manufacturing the special shape micro-structures with hard and brittle materials , the ultrosonical combined electrical micro-machining method is proposed and improved. The ultrasonical combined synchronous electrochemical micro-machining system is built and optimized, which machining parameters can be adjusted in a big ranges, and the synchronous target between the ultrasonical vibration and the voltage of micro-PECM(Micro-pulse electrochemical machining) can be realized. The micro-machining electrodes are manufactured in round sections by combined micro electrical-discharged machining (EDM).The mechanism tests of ultrasonic vibration combined electrical pulse micro-machining tests are carried. It is adopted that the low amplitude of electrical voltage (no more than 6V) and the static electrolyte with lower electrical conduction rate, the good machining accuracy and surface quality are acquired. The regular morphology array micro-round holes are manufactured successfully on friction units' working surface, which can save oil , improve the friction performances and prolonging working life of important friction units. In additional, the fixed holes satisfying the precision needs are machined on the hard and brittle piezo-ceramics pieces, which are often used in many important micro-precise piezo-ceramics sensor. It is proved that ultrasonic combined electrical micro-machining is an effect method for to machine the special shape micro-structures.