Abstract

The surface roughness of a large-size super-smooth mirror is studied by grazing incidence X-ray scattering method (GIXRS). We derive the two-dimensional theoretical model based on Tong's result in 1993; In light of our formulae, the power spectrum density (PSD) of a mirror surface can be correlated to the intensity distribution of X-ray scattering. A 210mm-long mirror is measured at the beamline 16B at Shanghai Synchrotron Radiation Facility (SSRF) and the data is analyzed. The result indicates that the root mean square (RMS) of the surface roughness calculated by our formulae is in good agreement with that measured by a white-light 3D profiler.

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