Abstract
Amorphous carbon films formed by ion beam processes have been examined using infrared spectroscopy. The films contain hydrogen that is primarily bonded to tetrahedral carbon atoms (sp3), but, depending upon starting materials and/or deposition parameters, varying amounts of sp2 and even sp1 coordination have been observed. On heating the carbon films for 1 h under vacuum, in the 500°C range, the sp3 carbons lose hydrogen, forming sp2 bonds. Remaining hydrogen is lost and the films lose transparency upon heating to 700°C or more, suggesting the critical nature of hydrogen in the films.
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