Abstract
High reflectivity multilayered mirrors for the soft X-ray region were deposited using a triode sputtering system equipped with an accurate method of film thickness monitoring and giving very sharp interfaces and a high stack regularity. Absolute reflectivity measurements of W/C and Ni/C multilayers were carried out at λ = 44.79 A ̊ and λ = 67.8 A ̊ using a special soft X-ray spectrogoniometer which enables the manufacturing conditions to be optimized rapidly without the need for the synchrotron radiation. Magnetic studies of Ni/C multilayer films yielded information on the structure of the interfaces.
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