Abstract
The growth of GaN quantum dot multilayers embedded in an AlN matrix can be controlled using the Stranski–Krastanov mode. For samples grown in the wurtzite structure, we present a non-destructive statistical investigation of the quantum dot shape, size and correlation, in both lateral and vertical directions using grazing incidence small angle X-ray scattering. In surface plane, the adjustment of the measurement leads to values for the size and the inter-dot distance that are consistent with direct characterization. In the vertical direction, the correlation length is quantified and shows the perfect vertical alignment of the dots.
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More From: Physica E: Low-dimensional Systems and Nanostructures
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