Abstract
The structure of perhydropolysilazane (PHPS)-derived silica (PDS) waterproof thin layers synthesized by curing at 60 °C for 1 h and allowed to stand for 48 h at 20 °C on various kinds of substrates was studied. Neutron reflectivity (NR) analysis suggested that uniform PDS thin layers were synthesized on the substrates, and the density of the layers varied depending on the type of substrate. Additionally, since the change in PDS density is correlated with the pKa value of the OH group on the substrate, it can be suggested that the acidity of the substrate would be one of the main factors determining the density of the coated PDS thin layers. For the water penetration structure study, NR analysis revealed that the depth of water penetration into the PDS layers was below 500 Å, and the hydration number of the SiO2 molecule was estimated to be 8.0–9.0. From these results, we concluded that water penetration occurred by the formation of water-pool structures in the PDS layers, and the randomly formed nano-air holes lead to a reduction in the probability of water penetration into the deep regions of the PDS layers.
Highlights
Silicon-based protective coatings have been widely accepted and employed in many applications such as semiconductor devices, tablewares, and metallic substrates
PHPS-derived silica (PDS) the thinchange layers inwere density of the results indicated that no unreacted molecules remained uniform in the depth direction, and the low scattering length density (SLD) values of the PDS layer as SiO2 may be attributed to in
Since the SLD values of the PDS layers decrease with increasing the degree of water penetration into the layer quantitatively, we evaluated the abundance of water penetrated into the PDS layer
Summary
Silicon-based protective coatings have been widely accepted and employed in many applications such as semiconductor devices, tablewares, and metallic substrates. Many studies have focused on silicon-based materials and studied their SiO2 network formation mechanisms [6,7,8,9]. SiO2 is research on theon nano-structure and detailed synthesis mechanisms for thefor preparation of SiO2oflayers layers is important for the development of silicon‐based coating materials. We prepared the thin layer samples to elucidate the nano-structure of PDS thin layers. We prepared the PDS thin layer onsamples differenton kinds of substrate. Since neutron scattering is especially sensitive to to PDS nano-structure was investigated. We elucidated the waterproof mechanism of thin layers in terms technique. We elucidated the waterproof mechanism of PDS thin layers in terms of of the the nano-scale nano‐scale structure
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