Structural Properties of a-Ge1-xCx:H Alloys Prepared by the RF Sputtering Technique

Abstract

ABSTRACTStructural and mechanical properties of hydrogenated amorphous germanium carbon (a-Ge1-xCx:H) alloys are presented. The films were prepared by the rf-co-sputtering technique using a graphite/germanium composed target. The carbon and germanium relative concentrations were determined by RBS, and the total hydrogen concentration by ERDA measurements. An increase in the optical gap was measured for low carbon content (0 < × < 0.15). For higher values of x the optical gap is almost constant. Infrared transmission absorption spectra show several absorption bands related to Ge-C stretching, C-Hn (n = 1,2,3) and Ge-H stretching and bending modes. The mechanical internal stress was strongly affected by the incorporation of carbon. The trends of the optical gap, refractive index, infrared absorption and mechanical stress as a function of the carbon content suggest that the high carbon concentration alloys have polymeric and/or graphite-like contribution in their structure.