Abstract

The surface morphologies, alloy compositions and emission properties of In-richInxGa1−xN nanodots (x≥0.87) grown by metallo-organic chemical vapor deposition at various growth temperatures(550–750 °C) were investigated. We found that the nucleation of InGaN dots was dominated by thesurface migration of In adatoms. A higher Ga content can be achieved at lower growthtemperatures due to the relatively lower migration ability of Ga adatoms. At higher growthtemperatures, the InGaN dots tend to decompose into In-rich islands and a thin Ga-richlayer. These In-rich islands exhibit photoluminescence emission in the near-infrared range.Another visible emission band was also observed for samples grown at higher temperatures.The formation of a thin Ga-rich layer is likely to be responsible for the visible emission.

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