Abstract
This work mainly focuses on the development of germanium-based thin-film piezoresistive strain gauges on thin NiTi and stainless steel cylinders. These microgauges enable the real-time measurement of the cylinder's strain distribution from which its deflection status can be deduced, based on an analytical mechanical model of thin cantilever beams. The adaptation of thin cylinders to typical micromachining equipment requires several adjustments in preparation works. The fabrication process of germanium microgauges also has to be adjusted according to the particularities of metal substrates. A number of polycrystalline germanium strain microgauges of various dimensions are implemented on thin cylinders. The results of the fabrication process are presented. The existing constraints of the current process and the potential improvement measures are then discussed.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
