Abstract
The dynamics of strain relaxation and intermixing during molecular beam epitaxy of La2O3 and Lu2O3 superlattices and alloys consisting of both binaries on Si(111) have been studied by real-time in situ grazing incidence x-ray diffraction and high resolution transmission electron microscopy. The presence of both hexagonal and cubic polymorphs of La2O3 influences the epitaxial formation within the superlattice. The process of strain relaxation is closely related to the presence of a (La,Lu)2O3 alloy adopting a cubic symmetry. It is formed by interdiffusion of La and Lu atoms reducing internal lattice mismatch within the superlattice. An interface thickness dominated by interdiffusion regions of about 3 monolayers is determined by high-angle annular dark field scanning transmission electron microscopy.
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