Abstract
A semi-empirical detector response function (DRF) model of a Si (PIN) detector is proposed to fit element Kα and Kβ X-ray spectra, which is based on the statistical distribution analytic (SDA) method. The model for each single peak contains a step function, a Gaussian function, and an exponential tail function. Parameters in the model are obtained by the weighted nonlinear least-squares fitting method. In the application, six kinds of elements' characteristic X-ray spectra are obtained by using the Si (PIN) detector, and fitted by the established DRF model. Reduced chi-square values are at the interval of 1.11–1.25. Other applications of the method are also discussed.
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