Static responses of a multilayered anisotropic piezoelectric structure to point force andpoint charge**Publication of the National Institute of Standards and Technology, an agency of the USGovt; not subject to copyright.

Abstract

This paper studies three-dimensional (3D) static responses of a multilayered anisotropicpiezoelectric structure due to a point force and point charge. The materials in each layerare homogeneous, generally anisotropic, and linearly piezoelectric, and in general differentfrom one another. The interfaces between adjacent layers are perfectly bonded. Thegeneralized Stroh formalism and two-dimensional (2D) Fourier transforms areemployed to find the responses in terms of a 2D integral. For a layered structuremade of ten alternating layers of piezoelectric AlN and InN on an InN substrate,we show that the responses due to the point force and point charge are greatlyinfluenced by the material layering, showing complicated patterns through the layerthickness. Furthermore, the responses exhibit the asymptotic behavior in the case ofhomogeneous infinite space/half-space in a very short distance to the point source, aboutone tenth of the layer thickness. The complicated responses due to the layeredheterogeneity dictate the need for a general 3D analysis in the design of such smartstructures.