Stability of an SHF Discharge Running in a Resonator‐Type Plasmatron on the Basis of a Waveguide‐Slit Applicator

Abstract

Using the method of optical emission spectroscopy, the dynamics of the development and “extinction” of a pulsating SHF discharge, its time instability, and the ranges of stable pressure‐related operation of a resonator‐type SHF plasmatron on the basis of an annular waveguide‐slit applicator were investigated. It is found that at the pressures of CF4 and its mixtures with oxygen optimal for breakdown a virtually complete lack of reproducibility of the signals of the components of the emission spectrum (in particular, of the FI 703.7‐nm line) from pulse to pulse of the discharge has been established. A discharge in oxygen in the investigated range of pressures and powers is characterized by a good repetition of the form of the pulses of the emission spectrum line (considered in relation to the OI 844.6‐nm line).