Abstract
We present an in situ high-temperature confocal laser microscopy study on the thermal stability of 40nm thick gold thin films grown on 40nm Ti, TiOx and ZnO adhesion layers on (001) Si. In situ observation of the dewetting process was performed over a wide range of set temperatures (400–800°C) and ramp rates (10–50°Cmin−1) for each gold/adhesion layer combination. We found that significant dewetting and subsequent formation of gold islands occurs only at and above 700°C for all adhesion layers. The dewetting is driven to equilibrium for gold/ZnO compared to gold/Ti and gold/TiOx as confirmed by ex situ X-ray diffraction and scanning electron microscopy characterization. Quantification of the in situ data through stretched exponential kinetic models reveals an underlying apparent activation energy of the dewetting process. This energy barrier for dewetting is higher for gold/Ti and gold/TiOx compared to gold/ZnO, thus confirming the ex situ observations. We rationalize that these apparent activation energies correspond to the underlying thermal stability of each gold/adhesion layer system.
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