Abstract

Optical emission spectroscopy is applied to obtain the rotational and gas temperatures of an inductively-driven tandem plasma source of negative hydrogen ions. Discharges are maintained in hydrogen at fixed frequency f = 27 MHz, applied power P = 500 W, and low gas pressure in the range p = (26 - 60) mTorr. The rotational and gas temperatures are determined by analyzing the intensity distribution of the H2 Fulcher-α band (d 3∏u → a3σg+) line emission.

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