Abstract
We present a spectroscopic ellipsometric (SE) study of ta-C and ta-C:N films obtained in a filtered cathodic vacuum arc system with an improved S-bend filter that yields high values of sp 3 content and mass density. The films consist of an ambient/roughness/film/interface/substrate structure, as demonstrated by X-ray reflectivity (XRR) and SE. The optical properties of the films have been derived by using four different approaches for the optical function: (i) Cauchy's absorbent dispersion formula; (ii) the contribution of three classical oscillators; (iii) the Forouhi–Bloomer model; and (iv) the Tauc–Lorentz model. The interface appears to be a mixture of a-Si and ta-C material, due to an amorphisation process originated by the carbon ion bombardment. The comparison of SE with XRR results, as well as the dependence of the fitted parameters with mass density, allows the Tauc–Lorentz model to be applied with confidence.
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