Abstract

The formation of thin titanium oxide films by pulling substrates from an alcohol solution of titanium tetraisopropoxide has been investigated. It is shown that the deposited titanium oxide layer consists of a continuous film and titanium oxide globules on its surface. It is found that the density and height of the globules depend on the pulling rate from the solution and the relative humidity in the working chamber, while the thickness of the continuous titanium oxide film is relatively constant.

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