Abstract

In experiments, the characteristics of a non-self-sustained arc discharge in pure vapors of monocrystalline zirconium were investigated. The minimum ignition power of the discharge in zirconium vapor was determined for experimental conditions. Also the main characteristics of the generated plasma streams were measured. The growth rates of zirconium films have been determined for various modes of the discharge operation. It is proved that the plasma stream generated by the arc discharge in zirconium vapor has a compensated volume charge and can be used to created metal films and coatings on the substrates of different materials. The coefficients of plasma streams ionization are determined and the possibility of their controlled change is shown. This capability can be used for the targeted control of the properties of the films and coatings.

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