Abstract
This paper offers some of the achievements of modern optical metrology. The basic approach of metrology from the nano to the pico level optical measurements is considered in this paper. Control of nano (micro) particle motion by an optical field and their using for testing complex optical fields is presented, as a general concepts of optical field metrology. Optical metrology, which is provided by three-dimensional polarization distributions of optical fields, where structured light plays a special role; by using femtosecond lasers, and much more, demonstrates the prospects of optical methods in modern measuring systems.
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