Solid state cesium ion guns for surface studies (abstract)

Abstract

Three cesium ion guns covering the energy range of 5–5000 V are described. These guns use a novel source of cesium ions that combine the advantages of porous metal ionizers with those of aluminosilicate emitters. Cesium ions are chemically stored in a solid electrolyte pellet and are thermionically emitted from a porous thin film of tungsten at the surface. Cesium supply to the emitting surface is controlled by applying a bias across the pellet. A total charge of 10.0 C can be extracted, corresponding to greater than 2000 h of lifetime with an extraction current of 1.0 μA. This source is compact, stable, and easy to use, and produces a beam with >99.5% purity. It requires none of the differential pumping or associated hardware necessary in designs using cesium vapor and porous tungsten ionizers. It has been used in ultrahigh-vacuum (UHV) experiments at pressures of <10−10 Torr with no significant gas load. Three different types of extraction optics are used depending on the energy range desired. For low-energy deposition, a simple space-charge-limited planar diode with a perveance of 1×10−7 A/V3/2 is used. Current densities of 10.0 μA/cm2 at the exit aperture for energies ≤20 V are typical. This type of source provides an alternative to vapor deposition with the advantage of precise flux calibration by integration of the ion current. For energies from 50 to 500 V and typical beam radii of 0.5 to 0.2 mm, a high perveance Pierce-type ion gun is used. This gun was designed with a perveance of 1×10−9 A/V3/2 and produces a beam with an effective temperature of 0.35 eV. For the energy range of 0.5 to 5 keV, the Pierce gun is used in conjunction with two Einzel lenses, enabling a large range of imaging ratios to be obtained. Beam radii of 60 to 300 μm are typical for beam currents of 50 nA to 1.0 μA. Results are presented and discussed for UHV studies of ion implantation, electronic surface changes induced by adsorbates, and negative secondary-ion mass spectrometry.