Abstract
A series of FeCoHfO films were fabricated by dc magnetron reactive sputtering at varying partial pressure of oxygen (Po2) from 0 to 11.7%, and the electrical and magnetic properties of films have been studied. It is shown that optimal Fe43.29Co19.51Hf7.49O29.71 films with desired properties can be obtained when the films were prepared under Po2 = 5.1%. The films show superior properties of low coercivity, Hc ∼ 5.5 Oe, relatively high saturation magnetization, 4πMs ∼ 18.3 kG, high anisotropy field Hk ∼ 65 Oe, and high electrical resistivity ρ ∼ 2675 μΩ · cm. Permeability spectra shows that the natural ferromagnetic resonant frequency is as high as ∼ 3.1 GHz. The combined merits of the film make the films taken as an ideal candidate material for high-frequency applications such as noise suppressor. In addition, the effects of the film thickness and annealing treatment on the magnetic properties are also reported.
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