Abstract
Amorphous intermediate layers are studied to improve soft magnetic properties of Fe-based multilayers, since the interfacial stresses between layers are assumed to be low. Fe multilayers with crystalline intermediate layers (e.g., Ni-Fe alloy) required heat treatment to release interfacial stress to achieve soft magnetic properties. Multilayers Fe/B4C, Fe/SiC, and Fe/C (B4C, SiC, and C layers are amorphous when formed by ion beam sputtering) show relative permeabilities over 2000 and coercivities below 56 A/m (=0.7 Oe), even without heat treatment. In particular, Fe/B4C multilayers with B4C thicknesses over 0.5 nm show clear periodic structures, even smaller crystallite sizes, and relative permeabilities above 3000, while the films have saturation magnetic flux densities above 1.8 T.
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