Abstract
A gas sensor array was developed in a 10 × 10 mm2 space using Screen Printing and Pulse Laser Ablation Deposition (PLAD) techniques. Heater, electrode, and an insulator interlayer were printed using the screen printing method on an alumina substrate, while tin oxide and platinum films, as sensing and catalyst layers, were deposited on the electrode at room temperature using the PLAD method, respectively. To ablate SnO2 and Pt targets, depositions were achieved by using a 1,064 nm Nd-YAG laser, with a power of 0.7 J/s, at different deposition times of 2, 5 and 10 min, in an atmosphere containing 0.04 mbar (4 kPa) of O2. A range of spectroscopic diffraction and real space imaging techniques, SEM, EDX, XRD, and AFM were used in order to characterize the surface morphology, structure, and composition of the films. Measurement on the array shows sensitivity to some solvent and wood smoke can be achieved with short response and recovery times.
Highlights
An array gas sensor is comprised of two or more sensors on a nonconductive substrate, having individual sensor elements, formed by semiconductor oxides
Soft lithography micromolding in capillaries has been used by Heule et al [1] to fabricate twelve miniaturized gas sensors of nanoparticulate tin oxide as an array on a single microhotplate to detect carbon monoxide
Ha et al, developed a sensor array device consists of 16 separate sensors; each sensor equipped with an interdigitated electrode and integrated Pt microheater using micromachined wet etching well [2]
Summary
An array gas sensor is comprised of two or more sensors on a nonconductive substrate, having individual sensor elements, formed by semiconductor oxides. Yaowu et al, have reported a micromachining technique to fabricate eight individual gas sensors in form of an array onto an n-type silicon wafer [6] They deposited a composition of SnO2 and Ti2O3 as sensitive layer by electron beam evaporation using a metal mask. Chemical vapor deposition (CVD) suffers from complex processes, temperatures of 600 °C and above needed to grow epitaxial films, and requires starter materials with high vapor pressure which are often hazardous and extremely toxic [11,12] Another method for deposition a sensitive thin layer is pulse laser ablation deposition (PLAD), with many promises for deposition different thin layers in sandwich form based-on different targets, which can operated under any ambient gas (pressure range 0–1 Torr), with ease of thickness control, low substrate temperature, and reasonable deposition rate [13,14,15]. Screen printing technique is employed to fabricate the heater and electrode parts, while the pulse laser ablation deposition (PLAD) is used to deposit the sensitive (SnO2) and catalyst (Pt) layers
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