Abstract

Electron energy loss (EEL) spectroscopy and high angle annular dark field (HAADF) imaging in aberration-corrected electron microscopes are powerful techniques to determine the chemical composition and structure of materials at atomic resolution. We have implemented Smart Acquisition, a flexible system of scanning transmission electron microsocpy (STEM) beam position control and EELS collection, on two aberration-corrected dedicated cold field emission gun (FEG) STEMs located at SuperSTEM, Daresbury Laboratory. This allows the collection of EEL spectra from spatially defined areas with a much lower electron dose possible than existing techniques such as spectrum imaging.

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